產品介紹
On wafer device characterization system
Reliability / stress test / breakdown test
MOSFET Id-Vg / Id-Vd / Vth
規格
Keysight (Agilent) B1500A Semiconductor Device Analyzer（半導體元件分析儀 / 參數分析儀） 為旗艦級 Device Characterization System，採用模組化平台，可依需求配置 SMU / CMU / PGU / WGFMU 等量測模組，支援 DC I-V、Pulsed I-V、C-V / QSCV、可靠度 Stress 等完整元件特性分析，適用於 MOSFET / FinFET / TFT / Diode / BJT / Power Device（SiC / GaN） 等測試場景。
模組化架構（Modular Measurement Platform）
主機採 Mainframe 模組化設計，可依需求擴充量測通道與功能 Modular mainframe design for flexible channel and function expansion 支援多種量測模組（依配置）：
CMU（Capacitance Measurement Unit）
WGFMU（Waveform Generator/Fast Measurement Unit）
可搭配 Switch Matrix / MUX 建置多 DUT 自動測試架構
Supports switching matrix / multiplexer for automated multi-DUT characterization
I-V 特性量測（DC I-V Characterization）
支援多通道 DC I-V 量測：Sweep / Step / Point measurement Supports multi-channel DC I-V sweep and point measurements
| 常用量測 | Id-Vg / Id-Vd / Vth / Leakage / Breakdown |
|---|---|
| Key measurements | Id-Vg, Id-Vd, threshold voltage, leakage, breakdown |
| 適用元件 | MOSFET、TFT、Diode、BJT、Power Device 等 |
Suitable for MOSFET/TFT/Diode/BJT/Power device characterization
超低漏電量測（Ultra-Low Leakage Measurement）
依 SMU 模組配置可支援 fA 等級超低漏電量測
fA-level ultra-low leakage measurement capability (depends on SMU modules) 支援 Triax / Guard 架構降低漏電與雜訊，提升高阻抗測試穩定度 Triax/guarding improves accuracy for high-impedance measurements
C-V / QSCV 量測（Capacitance-Voltage Measurement）
依 CMU 模組配置支援 C-V / QSCV（Quasi-Static C-V）
適用於：氧化層、介電層、MOS 結構、材料與製程參數分析 Suitable for dielectric/oxide/MOS structure characterization
Pulsed I-V 脈衝量測（Pulse Measurement）
支援 Pulsed I-V / Pulsed bias 測試（依 PGU / WGFMU 配置） Supports pulsed I-V and pulsed bias measurements (PGU/WGFMU modules) 可降低 self-heating 影響，適用功率元件（SiC / GaN）與高電流元件量測
Minimizes self-heating effects; ideal for SiC/GaN power device characterization
支援 Stress / Endurance / Breakdown / Aging 等可靠度測試流程（依模組/設定） Supports reliability tests such as stress, endurance, breakdown, aging
Enables on-wafer reliability evaluation with wafer prober
On-wafer 晶圓級量測（Wafer Probing）
可整合 Wafer Prober、Probe Card、Triax Cable、Switch Matrix Integrates with wafer prober, probe card, triax cabling, and switching matrix
Ideal for R&D, process development, and QA verification
支援圖形化量測、曲線繪製與參數萃取
Provides graphical measurement and data analysis capability 可整合自動化量測系統，適用於 ATE/批次測試 Enables automated test flows for ATE and batch characterization
Supports programmatic control for semiconductor characterization setups
原廠英文說明
Flagship Semiconductor Device Analyzer / Parameter Analyzer for advanced device characterization Modular mainframe architecture supports flexible configuration with SMU / CMU / PGU / WGFMU modules Supports DC I-V / Pulsed I-V / C-V (including QSCV) measurements for full characterization
Designed for ultra-low leakage measurements (fA level, depending on SMU module configuration) Enables on-wafer device characterization & reliability tests with stress / breakdown / endurance evaluation Integrated automation capability for R&D, process verification, QA, and ATE applications
Provides graphical data display / analysis and supports programmatic control for test automation Keysight B1500A semiconductor device analyzer
Agilent B1500A parameter analyzer
Semiconductor Device Analyzer / Parameter Analyzer